Le trifluorure d'azote est utilisé pour la gravure ionique réactive des wafers en silicium. Le NF3 y est décomposé in situ en azote et fluor, et les radicaux fluor obtenus agissent comme des agents nettoyants qui attaquent le silicium. Il peut être aussi utilisé avec le nitrure de silicium, le siliciure de tungstène, et le tungstène produits par dépôt chimique en phase vapeur. Dans toutes ces applications, le NF3 a été choisi vers l'an 2000 comme substitut plus protecteur pour l'environne… Nitrogen trifluoride (NF 3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics. Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas. Its … See more Nitrogen trifluoride did not exist in significant quantities on Earth prior to its synthesis by humans. It is a rare example of a binary fluoride that can be prepared directly from the elements only at very uncommon … See more NF 3 is a greenhouse gas, with a global warming potential (GWP) 17,200 times greater than that of CO 2 when compared over a 100-year period. Its GWP place it second only to SF 6 in the group of Kyoto-recognised greenhouse gases, and NF 3 was included in that … See more • IPCC list of greenhouse gases • Nitrogen pentafluoride • Tetrafluorohydrazine See more Etching Nitrogen trifluoride is primarily used to remove silicon and silicon-compounds during the manufacturing of semiconductor devices such as See more Skin contact with NF 3 is not hazardous, and it is a relatively minor irritant to mucous membranes and eyes. It is a pulmonary irritant … See more • National Pollutant Inventory – Fluoride and compounds fact sheet at the Wayback Machine (archived December 22, 2003) • NF3 Code of Practice (European Industrial Gas Association)] • WebBook page for NF3 See more
Nitrogen trifluoride Gas Encyclopedia Air Liquide
WebGlobal Warming Potential Values The following table includes the 100-year time horizon global warming potentials (GWP) relative to CO2.This table is adapted from the IPCC … deakin low risk ethics application form
Silane Gas Encyclopedia Air Liquide
WebFeb 17, 2024 · Nitrogen trifluoride (NF3) can be called the missing greenhouse gas: It is a synthetic chemical produced in industrial quantities; it is not included in the Kyoto basket … WebNitrogen trifluoride (NF 3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics. Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas.Its atmospheric burden exceeded 2 parts per … WebTraductions en contexte de "gaz à effet de serre règlementés" en français-anglais avec Reverso Context : Il est intéressant de noter que les HFC ne sont responsables que de 0,7% des gaz à effet de serre règlementés par le Protocole de Kyoto dans le cadre de la CCNUCC, fait que l'Inde s'est fait un point d'honneur à signaler. generalization\\u0027s t8